Semiconductor & Solar

Precision for highly sensitive processes.

Semiconductor & Solar

Precision for highly sensitive processes.

Our Flowmax® series ultrasonic flow meters are specially designed for liquid media – even aggressive chemicals. We set global standards in flow monitoring and control as well as fast and highly accurate dosing and filling technology.

Leading companies in the semiconductor industry and plant engineering have been relying on Flowmax® for years when it comes to absolute process reliability and maximum reproducibility.

Your advantages with Flowmax®:

  • Exact guidance and control of dynamic processes
  • Precise dosing & re-dosing of chemicals (spiking)
  • Reliable quantity control for recipes (bath management)
  • Self-sufficient process control possible
  • Measurement of conductive & non-conductive liquids
  • Integrated empty pipe and limit value monitoring
  • Free pipe cross-section, no moving parts

Typical applications:

  • Dosing and re-spiking of chemicals and ultrapure water
  • Safe preparation and monitoring of recipes
  • Reliable emptying of chemical containers
  • Pump protection

Recommended devices:

  • Flowmax® 4000i Material PFA, for very small nominal diameters
  • Flowmax® 400i Material PFA
  • Flowmax® 42i Material PE, PP
  • Flowmax® 54i Material PP-H, PVDF

With our many years of experience in flow measurement technology, we support operators and plant engineers in implementing safe, sustainable and efficient processes.